Microactuator Material with Strong Power and Large Actuation. TiNi-base Shape Memory Alloy Thin Films.
نویسندگان
چکیده
منابع مشابه
Residual Stress of TiNi Shape Memory Alloy Thin Films with (111) Single-crystal Silicon Wafer
As micro-actuator materials, TiNi shape memory alloy thin films with substrate are used more and more in MEMS field. The residual stress in Ti-rich TiNi thin films with silicon substrate prepared by the magnetron-sputtering technique is measured by both X-ray glancing and contour method. The influence of crystallization annealing temperature and film thickness on the residual stress is tested. ...
متن کاملDeformation Properties of TiNi Shape Memory Alloy
In order to describe the deformation properties due to the martensitic transformation and the R-phase transformation of TiNi shape memory alloy, a thermomechanical constitutive equation considering the volume fractions of induced phases associated with both transformations is developed. The proposed constitutive equation expresses well the properties of the shape memory effect, pseudoelasticity...
متن کاملThermomechanical Properties of TiNi Shape Memory Alloy
The thermomechanical properties of shape memory effect and superelasticity due to the martensitic transformation and the R-phase transformation of TiNi shape memory alloy were investigated experimentally. The transformation line, recovery stress and fatigue property due to both transformations were discussed for cyclic deformation. The thermomechanical properties due to the R-phase transformati...
متن کاملCrystallization kinetics of amorphous NiTi shape memory alloy thin films
The temperature dependence of the crystallite nucleation and growth rates is measured for amorphous NiTi thin films. Using transmission electron microscopy, crystallites are shown to nucleate homogeneously in the film and to grow in a channeling mode. A mechanism that suppresses heterogeneous nucleation is proposed. By manipulating nucleation and growth rates, grains as large as 60 lm can be ob...
متن کاملLaser annealing of amorphous NiTi shape memory alloy thin films to locally induce shape memory properties
We present the results of a crystallization study on NiTi shape memory thin films in which amorphous films are annealed by a scanning laser. This technique has the advantage that shape memory properties can be spatially distributed as required by the application. A kinetics study shows that nucleation of the crystalline phase occurs homogenously in the films. Consequently, the laser annealing p...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Materia Japan
سال: 1999
ISSN: 1340-2625,1884-5843
DOI: 10.2320/materia.38.279